The trend in the evolution of future sensor systems is directed to ultra low-power integrated devices with wireless and energy harvesting capability. It is clear that any technical solution is challenging especially given the wide range of related topics. Advanced chemical sensors and biosensors, sensors of physical quantities, on-chip energy storage, special integrated circuit systems with auto-diagnostic properties, and enhanced metrology methods are the main research domain in the research group. All functionalities of the sensor systems are developed to be integrated using nano- and microtechnologies because the size of each individual component is the most decisive parameter when targeting a highly-integrated and compact module design. The aims include as well wearable technology development which enables sensors systems to be easily integrated to clothes or placed directly on epidermis.

Who are we?

projects publications devices partners

Ulrich SchmidUlrich Schmid – TUW supervisor
Ulrich Schmid (TUW) started studying physics and mathematics at the University of Kassel in 1992. He performed his diploma work at the research laboratories of the Daimler-Benz AG on the electrical characterization of silicon carbide (6H-SiC) microelectronic devices. Since October 2008, he is full professor for Microsystems Technology at the Vienna University of Technology, heading since 2012 also the Institute of Sensor and Actuator Systems.


Jaromír HubálekJaromír Hubálek – SIX supervisor
Jaromír Hubálek (BUT) received his PhD in Microelectronics and technologies at Brno University of Technology in 2003. During his fellowship at the University Rovira I Virgili, Tarragona (Spain) in 2000-2003, he was focused on developing of gas micro-sensors. In 2004 he founded Laboratory of Microsensors and Nanotechnologies. The objectives of his group are micro- and nanotechnologies for sensing and biosensing, and laboratory on a chip.


 Projects & Cooperation

  • A piezoelectric MEMS sensor based on resonant operation principles was developed in co-operation with AC²T Research to enable measurement of physical parameters like viscosity and density of liquid lubricants.
  • Strong cooperation with CSRC (Czech Space Research Center) which is engaged in aerospace design. Contribution and collaboration on Gradiometer project with CSRC and presently on other interesting projects provided by ESA (European Space Agency).
  • Nanoelectronics for Mobile AAL Systems (MAS) – consortial ENIAC project focused on development of AAL systems for Point of Care, no. 120228. Funding institution: European Union. Funding program: ENIAC-2009.
  • Energy harvesting for autonomous wireless sensor node in aircraft – A thermoelectric energy harvester module was developed in cooperation with Airbus group to power structural health sensor nodes on an airplane using a phase changing material as storage for the thermal energy to provide sufficient energy output.
  • TES, EGU – HV laboratory – The partial discharges (PD) diagnostic sensor system was developed within collaboration and is utilized for real field diagnostic in nuclear power plant Dukovany. The PD diagnostic sensor system has received the main award on Amper 2015 exhibition as the most beneficial exhibit.

Publication record (selected)

  • Characterisation of Higher Orders of the Roof Tile-shaped Out-of-Plane Vibrational Modes in Aluminium-Nitride-actuated Self-sensing Micro-Resonators in Liquids
    M. Kucera, E. Wistrela, G. Pfusterschmied, V. Ruiz, J.L. Sánchez-Rojas, J. Schalko, A. Bittner and U. Schmid, Applied Physics Letters, Vol. 107, pp. 053506, 2015.
  • Adsorption–desorption noise in QCM gas sensors. P. Sedlak, J. Sikula, J. Majzner, M. Vrnata, P. Fitl, D. Kopecky, F. Vyslouzil and P.H. Handel, Sensors and Actuators B: Chemical, Vol. 166-167, pp. 264-268, 2012.
  • Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors. A. Mozalev, M. Sakairi, H. Takahashi, H. Habazaki, J. Hubalek, Thin Solid Films, Vol. 550, pp. 486-494, 2014.


  • The laboratory infrastructure for micromachined sensors and microsystems technology that has been built over many years represents a value of approximately 5 Mio. Euro and is a solid base for future research work. The laboratories comprise ca. 250 m² clean room area.

Partners (selected)

  • University of Castilla-La Mancha, Spain
    Long standing successful co-operation on the topic of piezoelectric MEMS resonator devices by combining modelling and simulation expertise with hardware design, manufacturing and characterization.
  • Imperial College, London
    In this co-operation, novel approaches to energy harvester designs based on thermoelectric energy generation are investigated.
  • Gdansk University of Technology – Prof. Janusz Smulko
    Mutual collaboration on fluctuation phenomena in chemical gas sensors within the Czech-Polish project 7AMB13PL032 and further projects have been applied.


  • Airbus group
    Energy harvesting for autonomous wireless sensor node in aircraft.
  • Infineon
    Development of advanced and robust materials for MEMS and power electronics.
  • Project with AVX on new protective coating of capacitors